Astronomy and Astrophysics – Astronomy
Scientific paper
Sep 2004
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2004spie.5501..101t&link_type=abstract
High-Energy Detectors in Astronomy. Edited by Holland, Andrew D. Proceedings of the SPIE, Volume 5501, pp. 101-110 (2004).
Astronomy and Astrophysics
Astronomy
1
Scientific paper
The NeXT (New X-ray Telescope) satellite to be launched around 2010, has a large effective area in the 0.1-80 keV band with the use of the multilayer super mirror. As the focal plane detector for NeXT, we have been developing the Wideband hybrid X-ray Imager (WXI) consisting of X-ray CCDs and a hard X-ray imager placed under X-ray CCDs. The X-ray CCD of WXI is required to (1) keep the high quantum efficiency up to the high energy band and (2) pass hard X-rays unabsorbed in the depletion (sensitive) layer. In order to meet these requirements, we have been developing the back supportless CCD which has the thick depletion layer, thinned Si wafer and back supportless structure. As the first step, we make the test model with thinned Si wafer in order to (1) learn the handling and thinning process and (2) confirm no change of the performance after the thinning process. The test model has the pixel number and size of 512 x 512 and 24 x 24 µm, respectively. We select the thickness of the wafer is about 200 µm considering the thinning process. We verify the depletion layer and the wafer of the test model are about 65 and 190 µm in thickness, respectively. The energy resolution is about 144 eV at 5.9 keV which is substantially comparable to the un-thinned CCD, hence we confirm our thinning process has no effect on the perfomance. In order to reduce the dead layer ompletely and increase the quantum efficiency at the high energy band, we are also developing the full depleted X-ray CCD with the high resistivity N-type Si wafer.
Kamata Yukiko
Koyama Katsuji
Matsumoto Hironori
Miyaguchi Kazuhisa
Miyata Emi
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