A study of transport and pyrolysis in the growth of CdxHg1-xTe by MOVPE

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Scientific paper

A study has been made of some of the factors affecting transport in the metalorganic vapour phase epitaxy (MOVPE) growth of cadmium mercury telluride (CMT), and their influence on the layer composition. Layers have been grown at different reactor wall temperatures to investigate the problems of (a) maintaining a sufficient mercury pressure and (b) premature pyrolysis of metalorganics on the reactor wall. Experiments have also been carried out on the role of tilting the susceptor with respect to the reactor axis and on adjustments in the ratio of the inlet dimethylcadmium (Me2Cd) to diethyltelluride (Et2Te) concentrations. The results of these growth experiments have been interpreted as changes in the ratio of effective Cd and Te concentrations on the substrate. These changes have been attributed to a number of processes such as changes in inlet concentrations, premature pyrolysis on the walls and incomplete pyrolysis on the substrate. At low mercury pressures, where it can be less thab the equilibrium value at the tellurium rich solidus, the composition moves towards the CdTe rich part of the pseudo-binary in order to accommodate this drop in mercury pressure. These changes in composition will occur whether the growth rates are controlled by transport or surface kinetics.

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