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Scientific paper
Apr 2010
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2010aipc.1236..273p&link_type=abstract
INTERNATIONAL CONFERENCE ON ADVANCED PHASE MEASUREMENT METHODS IN OPTICS AND IMAGING. AIP Conference Proceedings, Volume 1236,
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Micromechanical Devices, Optical Design Techniques, Phase Measurement, Interferometry, Optical Beam Splitters, Mirrors, Optical Elements, Devices, And Systems, Optical System Design, Phase Retrieval, Holographic Interferometry, Other Holographic Techniques, Reflectors, Beam Splitters, And Deflectors, Lenses, Prisms And Mirrors
Scientific paper
Advances in emerging technologies of microelectromechanical systems (MEMS) in general and micro-opto-electro-mechanical systems (MOEMS) in particular are some of the most challenging tasks in today's experimental mechanics. More specifically, development of these miniature devices requires sophisticated design, analysis, fabrication, testing, and characterization tools that have multiphysics and multiscale capabilities. One of the approaches employed in the development of microsystems of current interest is based on hybridization of the analytical, computational, and experimental solutions. In particular, the experimental solutions are relying on recent advances of the optoelectronic laser interferometric microscope (OELIM) methodology based on phase measurements. This hybrid approach is applicable under static and dynamic conditions and, as such, facilitates measurements of dynamic and thermomechanical behavior of the individual components, their packages, and other complex material structures. In this paper, the phase measurement methodology is described and its applicability is illustrated by use of representative micro-samples with emphasis on MOEMS. Shape, deformations, and motions of these samples are measured quantitatively in near real-time. Preliminary theoretical results correlate with the experimental results well within the criteria governed by the uncertainty analysis. Validated correlations will lead to establishment of ``design by analysis'' methodology for efficient and effective development of structures, which is becoming more and more necessary especially for the satisfaction of microsystem reliability assessment (MRA) requirements. All in all, representative results presented in this paper indicate that the phase measurement methodology is a viable tool for micro-scale measurements and, as such, it is particularly useful for development of microsystems.
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