Diffraction pattern of self-supporting transmission gratings

Mathematics

Scientific paper

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Diffraction Patterns, Extreme Ultraviolet Radiation, Gratings (Spectra), X Ray Sources, Doppler Effect, Matrices (Mathematics)

Scientific paper

Methods for the reduction of unwanted diffraction effects in self-supporting transmission gratings suitable for the soft X-ray and extreme UV ranges are considered. Methods are discussed in which: (1) members of the support structure parallel to the grating slits are placed in a random pattern, reducing the average coherence of the support structure everywhere; (2) the support structure members are distributed pseudorandomly, removing the diffraction pattern of the support structure from the diffraction plane: and (3) the pseudorandom placement of supports is organized into a repeated pattern.

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