Study of Anodic Oxide Films on Silicon Carbide

Details Study of Anodic Oxide Films on Silicon Carbide Study of Anodic Oxide Films on Silicon Carbide

Apr 2007

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2007aipc..899..784l&link_type=abstract

SIXTH INTERNATIONAL CONFERENCE OF THE BALKAN PHYSICAL UNION. AIP Conference Proceedings, Volume 899, pp. 784-784 (2007).

Other

Other Semiconductors, Methods Of Deposition Of Films And Coatings, Film Growth And Epitaxy, Oxidation, Anodic Films

Scientific paper

Anodic oxide films were grown on SiC using various electrolytes. The
obtained oxide films were compared and some of their electrophysical
properties were investigated. Anodic oxidation of SiC was shown to be
useful for precise removal of layers as well as for identification of
the polar faces of SiC crystals.

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