Very Large Format Back Illuminated CCDs

Details Very Large Format Back Illuminated CCDs Very Large Format Back Illuminated CCDs

Oct 2002

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2002exa....14...77l&link_type=abstract

Experimental Astronomy, v. 14, Issue 2, p. 77-82 (2002).

Astronomy and Astrophysics

Astronomy

Astronomy, Charge-Coupled Device (Ccd), Detectors, Imaging, Silicon

Scientific paper

The University of Arizona Imaging Technology Laboratoryhas processed several types of very large format (>4K × 4K pixel) charge coupled devices for low light level scientific applications. These back illuminated deviceswere produced from frontside die fabricated by or for Fairchild Imaging Systems, Semiconductor Technology Associates, the Jet Propulsion Laboratory, and Kodak. A Philips 7K × 9K frontside device has also been processed using similar techniques. The backside sensors yield >90% quantum efficiency (QE). All devices show excellent charge transfer efficiency (CTE > 0.999997) at operating temperatures (typically 100 °C). Devices specifically designed for low signal applications have been demonstrated with less than 4 electrons read noise.

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