Industrial applications of low temperature plasmas

Details Industrial applications of low temperature plasmas Industrial applications of low temperature plasmas

Jul 1998

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1998aipc..434..333b&link_type=abstract

The first international conference on atomic and molecular data and their standards. AIP Conference Proceedings, Volume 434, pp

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Discharges For Spectral Sources, Visible And Ultraviolet Sources, Atomic Spectra

Scientific paper

The use of low temperature plasmas in industry is illustrated by the discussion of four applications, to lighting, displays, semiconductor manufacturing and pollution control. The type of plasma required for each application is described and typical materials are identified. The need to understand radical formation, ionization and metastable excitation within the discharge and the importance of surface reactions are stressed.

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