Overview of MEMS/NEMS technology development for space applications at NASA/JPL

Details Overview of MEMS/NEMS technology development for space applications at NASA/JPL Overview of MEMS/NEMS technology development for space applications at NASA/JPL

Apr 2003

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2003spie.5116..136g&link_type=abstract

Smart Sensors, Actuators, and MEMS. Edited by Chiao, Jung-Chih; Varadan, Vijay K.; Cane, , Carles. Proceedings of the SPIE, Vol

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This paper highlights the current technology development activities of the MEMS Technology Group at JPL. A diverse range of MEMS/NEMS technologies are under development, that are primarily applicable to NASA"s needs in the area of robotic planetary exploration. MEMS/NEMS technologies have obvious advantages for space applications, since they offer the promise of highly capable devices with ultra low mass, size and power consumption. However, the key challenge appears to be in finding efficient means to transition these technologies into "customer" applications. A brief description of this problem is presented along with the Group"s innovative approach to rapidly advance the maturity of technologies via insertion into space missions. Also described are some of the major capabilities of the MEMS Technology Group. A few important examples from among the broad classes of technologies being developed are discussed, these include the "Spider Web Bolometer", High-Performance Miniature Gyroscopes, an Electron Luminescence X-ray Spectrometer, a MEMS-based "Knudsen" Thermal Transpiration pump, MEMS Inchworm Actuators, and Nanowire-based Biological/Chemical Sensors.

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