VCSEL-based MOEMS architectures: from nanofabrication to environmental sensing ?

Details VCSEL-based MOEMS architectures: from nanofabrication to environmental sensing ? VCSEL-based MOEMS architectures: from nanofabrication to environmental sensing ?

Oct 2000

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2000spie.4134..167g&link_type=abstract

Proc. SPIE Vol. 4134, p. 167-175, Photonics for Space Environments VII, Edward W. Taylor; Ed.

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We present an original MOEMS architecture that combines the optical feedback properties of a VCSEL cavity with the nanometer- scale resolution of a GaAs micromachined tip. First, we investigate the effects of external optical feedback on the threshold and spectral characteristics of VCSELs. Second, theoretical analysis and experimental evidence demonstrate the practicability of VCSEL feedback as a principle of optical detection for SNOM microscopy. Finally, we propose a compact architecture of a SNOM sensor with a microtip integrated beneath the VCSEL, report the preliminary results of fabrication of the device, and discuss the opportunity of such architecture in space applications.

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