Piezoelectric unimorph MEMS deformable mirror for ultra-large telescopes

Details Piezoelectric unimorph MEMS deformable mirror for ultra-large telescopes Piezoelectric unimorph MEMS deformable mirror for ultra-large telescopes

Jan 2005

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2005spie.5717...21h&link_type=abstract

MEMS/MOEMS Components and Their Applications II. Edited by Henning, Albert K. Proceedings of the SPIE, Volume 5717, pp. 21-29

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This paper describes the results of our demonstration on a proof-of-concept piezoelectric unimorph-based deformable mirror (DM) with continuous single-crystal silicon membrane. A PZT unimorph actuator of 2.5 mm in diameter with optimized PZT/Si thickness and design showed a deflection of 5 μm at 50 V. DMs consisting of 10 μm thick single-crystal silicon membranes supported by 4×4 actuator arrays were fabricated and optically characterized. An assembled DM showed a stroke of 2.5 μm at 50 V with a resonant frequency of 42 kHz and influence function of approximately 25%.

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