X-ray/VUV transmission gratings for astrophysical and laboratory applications

Details X-ray/VUV transmission gratings for astrophysical and laboratory applications X-ray/VUV transmission gratings for astrophysical and laboratory applications

Jan 1990

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1990phys...41...13s&link_type=abstract

Physica Scripta (ISSN 0031-8949), vol. 41, no. 1, Jan. 1990, p. 13-20.

Astronomy and Astrophysics

Astrophysics

14

Fabrication, Gratings (Spectra), Holography, Photolithography, Extreme Ultraviolet Radiation, Ultraviolet Spectroscopy, X Ray Astrophysics Facility, X Ray Spectra, X Ray Spectroscopy

Scientific paper

This paper describes the techniques used to fabricate deep-submicron-period transmission gratings for astrophysical and laboratory applications, with special attention given to the major steps involved in the transmission grating fabrication. These include the holographic lithography procedure used to pattern the master transmission grating, the fabrication of X-ray mask, the X-ray lithography step used to transfer the X-ray mask pattern into a substrate, and the electroplating of the substrate to form the final grating pattern. The various ways in which transmission gratings can be used in X-ray and VUV spectroscopy are discussed together with some examples of experiments reported in the literature.

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