Computer Science – Performance
Scientific paper
Apr 2010
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2010aipc.1236..295g&link_type=abstract
INTERNATIONAL CONFERENCE ON ADVANCED PHASE MEASUREMENT METHODS IN OPTICS AND IMAGING. AIP Conference Proceedings, Volume 1236,
Computer Science
Performance
Kalman Filters, Interference, Coherence Length, Thin Films, Optical Microscopy, Filters, Zone Plates, And Polarizers, Interference, Coherence, Design And Performance Testing Of Integrated-Optical Systems, Optical Elements, Devices, And Systems
Scientific paper
Low-coherence fringe signal model in interference microscopy is considered for the case of thin film thickness inspection. The extended Kalman filtering method is investigated applied to dynamic evaluation of thin film borders. Increased resolution of layer borders is provided by direct transformation of input fringe signal samples series to dynamic estimates of local fringe envelope maximum positions. Results of experimental estimates of the method resolving power in the case of partially overlapped envelope peaks presented and discussed.
Gurov Igor
Volynsky Maxim
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