Varied-line-spacing laminar-type holographic grating for the standard soft x-ray flat-field spectrograph

Details Varied-line-spacing laminar-type holographic grating for the standard soft x-ray flat-field spectrograph Varied-line-spacing laminar-type holographic grating for the standard soft x-ray flat-field spectrograph

Nov 2000

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2000spie.4146..163k&link_type=abstract

Proc. SPIE Vol. 4146, p. 163-170, Soft X-Ray and EUV Imaging Systems, Winfried M. Kaiser; Richard H. Stulen; Eds.

Computer Science

7

Scientific paper

An aspheric wave-front recording system was designed to produce a holographic grating for use in a standard soft X- ray flat field spectrograph interchangeable with a mechanically ruled varied-line-spacing (VLS) grating. The grating grooves recorded with the designed aspheric wave- front recording system were processed to form a laminar groove profile by means of reactive ion etching. Measurements done with synchrotron radiation and a laboratory X-ray source are reported for this laminar-type grating and a commercial grating replicated from a mechanically ruled VLS grating that was specifically designed and fabricated for the standard soft X-ray flat- field spectrography. The laminar-type holographic grating is found to have an absolute first-order efficiency of approximately 10% for wavelengths of approximately 4.5 - 12 nm. It is also shown that the holographic grating is effective in suppressing the higher orders and stray-light level for soft X-ray of 4.36 nm (C-K) and has a comparable spectral resolution to the replica VLS grating.

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