Trends in gas sensors with tunable thin films

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Scientific paper

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Scientific paper

A new family of miniature nano-tunable narrowband infrared filters has been developed based on the thermo-optic properties of thin film semiconductors. Originally developed for fiber optic telecommunications networks at 1.5 μm, the technology has now been extended to the 3-5 μm range, leading to very compact tunable filters with passbands on the order of 0.5% of center wavelength and tuning ranges up to 4% of center wavelength. Two applications are described. First, a prototype carbon monoxide sensor testbed based on a 4550-4650 nm tunable filter is shown to be capable of detecting less than 20 ppm of CO. Second, we show how nano-tunable thin film filters can be integrated with miniature blackbody sources to create a new family of ultra low cost integrated tunable IR emitters, which we have named Firefly. Packaged in TO cans, Firefly devices enable precision detection of gases including carbon dioxide, carbon monoxide, sulphur dioxide, hydrogen cyanide, water vapor, nitric oxide or methane.

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