Three-band 1.0-2.5 um near-infrared InGaAs detector array

Computer Science

Scientific paper

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Scientific paper

A novel three wavelength InGaAs focal plane array pixel element for detection at wavelengths from 1.0 to 2.5 micrometers , where each of three wavelength sensitive detectors are individually addressable is described. This device consists of successively smaller bandgap layers in In(subscript x)Ga(subscript 1-x)As (x>=0.53), separated by compositionally graded layers of InAs(subscript y)P(subscript 1-y) to decrease defects induced by lattice mismatch strain with the InP substrate and provide high-bandgap passivation. The various layers were selectively removed so that p-n junctions with different wavelength response could be formed. The three detectors have quantum efficiencies between 55 and 95% for front illumination and 15 and 60% for back illumination, and dark currents from 0.01 to 10 mA/cm(superscript 2).

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