The effect of the low frequency voltage on the characteristics of the capacitively coupled dual frequency RF discharges

Details The effect of the low frequency voltage on the characteristics of the capacitively coupled dual frequency RF discharges The effect of the low frequency voltage on the characteristics of the capacitively coupled dual frequency RF discharges

Jul 2008

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2008pobeo..84..387b&link_type=abstract

Publications of the Astronomical Observatory of Belgrade, vol. 84, pp. 387-390

Astronomy and Astrophysics

Astronomy

2

Scientific paper

In this paper, a Particle-in-cell Monte Carlo collision (PIC/MCC) modeling of dual frequency (DF) asymmetric capacitively coupled plasma (CCP) sources has been performed. In particular, the following configuration has been modelled: 27/2 MHz system with an electrode separation of 2 cm and the gas pressure of 45 m Torr. The characteristics of dual-frequency argon discharge are studied for a wide range of low-frequency voltages.

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