The development of back-illuminated CCD's for XMM

Details The development of back-illuminated CCD's for XMM The development of back-illuminated CCD's for XMM

Dec 1992

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1992esasp.356...75v&link_type=abstract

In ESA, Proceedings of an ESA Symposium on Photon Detectors for Space Instrumentation p 75-80 (SEE N94-15025 03-19)

Astronomy and Astrophysics

Astronomy

3

Charge Coupled Devices, Gratings (Spectra), Spaceborne Astronomy, Spectrometers, X Ray Astronomy, X Ray Spectroscopy, Photons, Radiation Detectors, Satellite-Borne Instruments, Space Missions

Scientific paper

The Reflection Grating Spectrometer (RGS) on ESA's X-ray Multi Mirror mission (XMM) will perform spectroscopy in the energy range of 0.3 to 2.5 keV. For optimum photon detection efficiency, the RGS will be equipped with fully depleted, back illuminated large area CCD's (Charge Coupled Devices) as detectors. The backside accumulation layer is produced by ion implantation and subsequent pulsed laser annealing and should not be thicker than 0.05 micrometers. So far, the CCD development program has resulted in a large area CCD with good performance with respect to read noise, charge transfer efficiency, and radiation hardening. Back illuminated CCD's have been fabricated with very shallow activated p+ layers (0.06 micrometers, from spreading resistance profiles). X-ray measurements, however, indicate that there is a 0.22 micrometer thick layer with charge collection less than unity. This may be due to a layer of implanted boron and associated lattice damage, which is left unanealed. Anodic etching, ultralow energy implantation, and gas immersed laser doping are being studied as improvements and alternatives.

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