Technology for integrated spatial light modulators based on reflective membranes

Details Technology for integrated spatial light modulators based on reflective membranes Technology for integrated spatial light modulators based on reflective membranes

Feb 2002

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2002spie.4493...21s&link_type=abstract

Proc. SPIE Vol. 4493, p. 21-28, High-Resolution Wavefront Control: Methods, Devices, and Applications III, John D. Gonglewski; M

Statistics

Applications

Scientific paper

Two approaches toward the fabrication of a spatial light modulator are presented. The first approach uses a pixelated nitride membrane that is suspended by a grid structure over an electrode array. Deformation of each membrane segment is achieved by means of electrostatic attraction. By using a continuous reflective surface, we achieve a 100% optical fill factor. Since we can coat with any metal or combination of materials, these devices can, in principle, handle high optical loads over a wide spectral range. We have tried different spacer materials and dimensions with this approach. In the second approach, the membrane rests on a viscoelastic carrier layer. During fabrication we use the thin nitride membrane to ensure uniformity of the elastic layer after which it is used as an etch stop for the bulk silicon etchant. This type of device is more robust, can use smaller pixel sizes, but has less sensitivity at low voltages. To achieve an optimal, but simple fabrication procedure, the membranes and electronics are fabricated in different processes, ensuring a higher optical quality of the membrane and increasing yield at lower costs. Applications lie in the field of projection displays, optical lithography, optical communication networks, etc.

Affiliated with

Also associated with

No associations

Rating

Technology for integrated spatial light modulators based on reflective membranes does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.

If you have personal experience with Technology for integrated spatial light modulators based on reflective membranes, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Technology for integrated spatial light modulators based on reflective membranes will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFWR-SCP-O-1044009