System level simulation of micro-mirrors for adaptive optics

Details System level simulation of micro-mirrors for adaptive optics System level simulation of micro-mirrors for adaptive optics

Feb 2003

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2003spie.4842..207c&link_type=abstract

Specialized Optical Developments in Astronomy. Edited by Atad-Ettedgui, Eli; D'Odorico, Sandro. Proceedings of the SPIE, Volume

Astronomy and Astrophysics

Astronomy

Scientific paper

Electrostatically actuated micro-mirrors represent one of the most promising technologies for future adaptive optics systems. Due to their relatively high prototyping cost and long fabrication cycle, simulation is one of the key points of their design and optimization. Finite element analysis, behavioral modeling and electronic CAD packages are generally used to study each part of the mirror. This paper shows how the emerging VHDL-AMS language can be used to combine all these simulation tools, and obtain a dynamical simulation of the complete micro-mirror device. This model can then be used as a tool to optimize the characteristics of the mirror and its control electronics to match the specifications of various adaptive optics systems.

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