Study of RF PACVD diamond like carbon coatings deposited at low bias for vacuum applications

Details Study of RF PACVD diamond like carbon coatings deposited at low bias for vacuum applications Study of RF PACVD diamond like carbon coatings deposited at low bias for vacuum applications

Sep 2001

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2001esasp.480..309v&link_type=abstract

In: Proceedings of the 9th European Space Mechanisms and Tribology Symposium, 19-21 September 2001, Liège, Belgium. Compiled by

Mathematics

Logic

Tribology

Scientific paper

Currently, sputtered molybdenum disulphide (MoS2) is an established coating for space applications. However, when operated in air, molybdenum disulphide loses much of its lubricating power, thus preventing in-air ground testing. In this work, the tribological properties in vacuum, dry N2 and air of a-C:H films produced by radio frequency plasma assisted chemical vapour deposition (RF PACVD) were studied in order to assess their potential for applications in space. We demonstrated that diamond-like carbon (DLC) films deposited at low bias voltage show lubricating capacity under vacuum conditions. However, the shorter lifetime of the DLC films as compared to MoS2 under vacuum is considered as an important limiting factor.

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