Structure measurement of the CCD pixel using an x-ray beam

Details Structure measurement of the CCD pixel using an x-ray beam Structure measurement of the CCD pixel using an x-ray beam

Oct 1997

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1997spie.3114..230t&link_type=abstract

Proc. SPIE Vol. 3114, p. 230-240, EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy VIII, Oswald H. Siegmund; Mark A. Gumm

Astronomy and Astrophysics

Astronomy

1

Scientific paper

We report here the result of the structure measurement of a charge-coupled device (CCD) pixel withpixel resolution by using a new technique. The new technique makes use of a parallel x-ray beam and a metal mesh placed just in front of the CCD. The CCD camera we used in the first experiment, is a conventional system using the TC213 [Texas Instrument Japan (TIJ)] whose pixel size is 12 micrometers by 12 micrometers with one million pixels. The mesh has 4 micrometer diameter holes spaced at 12 micrometer intervals. We produced an efficiency map within a typical pixel showing the gate structure in detail. In the reconstruction process, we have to determine the mutual alignment between the CCD and the mesh in detail. The method we used can easily determine it with enough precision. By selecting single pixel events, we determined a pixel boundary. The distribution of two pixel split event can give us more information in the behavior of the primary charge cloud.

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