Static spectroscopic ellipsometer based on optical frequency-domain interferometry

Details Static spectroscopic ellipsometer based on optical frequency-domain interferometry Static spectroscopic ellipsometer based on optical frequency-domain interferometry

Jan 2002

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2002spie.4481..137o&link_type=abstract

Proc. SPIE Vol. 4481, p. 137-140, Polarization Analysis, Measurement and Remote Sensing IV, Dennis H. Goldstein; David B. Chenau

Computer Science

1

Scientific paper

This paper describes a novel spectroscopic ellipsometer using no mechanical or active components for polarization modulation. A pair of fairly-thick birefringent retarders are incorporated into the ellipsometer so that the spectrally-resolved ellipsometric angles (Psi) and (Delta) can be determined at once from only the single channeled spectrum. Its effectiveness is demonstrated with SiO2 films deposited on Si substrates.

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