Spatial Profiles Of Electron And Ion Concentrations In A Large Size Ccp Discharge Obtained By Using A Langmuir Probe

Details Spatial Profiles Of Electron And Ion Concentrations In A Large Size Ccp Discharge Obtained By Using A Langmuir Probe Spatial Profiles Of Electron And Ion Concentrations In A Large Size Ccp Discharge Obtained By Using A Langmuir Probe

Jul 2010

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2010pobeo..89..205l&link_type=abstract

Publications of the Astronomical Observatory of Belgrade, vol. 89, pp. 205-208

Astronomy and Astrophysics

Astronomy

Scientific paper

Electron and ion concentrations in a large scale capacitively coupled plasma are measured using Hiden ESPION Langmuir probe system for different distances from the powered electrode. The reactor is cylindrical and has a radius of 60 cm. Derivative probes were used to measure rms Volte/Ampere characteristics and from these curves it was possible to determine that plasma runs in the alpha mode. From the spatial profiles of ion concentrations optimum distance can be found for treatment of samples of different sensitivity.

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