Mathematics – Logic
Scientific paper
Dec 2005
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2005aas...207.1215h&link_type=abstract
American Astronomical Society Meeting 207, #12.15; Bulletin of the American Astronomical Society, Vol. 37, p.1172
Mathematics
Logic
Scientific paper
The Constellation-X mission design calls for a soft x-ray Reflection Grating Spectrometer (RGA) with light-weight reflection gratings placed in the converging beam of the Spectroscopy X-ray Telescope (SXT). Our early demonstration of high-efficiency saw-tooth reflection gratings for an in-plane diffraction geometry fabricated from off-cut anisotropically-etched silicon wafers was recently supplemented by the fabrication of high-efficiency gratings with parameters (grating period, blaze angle) suitable for an extreme off-plane mount. Patterning of large-area reflection gratings is efficiently done through Scanning Beam Interference Lithography (SBIL) on our so-called Nanoruler tool. Resolution goals require 2 arcsec or better flatness for 100-200 mm long and 0.5 mm thick thin-foil grating substrates. We designed and built an ultra-low-stress thin-foil metrology truss that allowed us to surpass this flatness requirement in combination with flattening via Magnetorheological Finishing (MRF).
Akilian Mireille
Chang Chao-Hsi
Heilmann Ralf K.
Montoya Juan C.
Schattenburg Mark L.
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