Soft X-ray performance of back-illuminated EEV CCDs

Details Soft X-ray performance of back-illuminated EEV CCDs Soft X-ray performance of back-illuminated EEV CCDs

Nov 1990

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1990spie.1344..356b&link_type=abstract

IN: EUV, X-ray, and Gamma-ray instrumentation for astronomy; Proceedings of the Meeting, San Diego, CA, July 11-13, 1990 (A92-20

Astronomy and Astrophysics

Astronomy

4

Charge Coupled Devices, Focal Plane Devices, X Ray Astronomy, X Ray Imagery, Cameras, European Space Agency, X Ray Spectroscopy, X Ray Telescopes

Scientific paper

The European Space Agency X-ray Multi-Mirror mission will be devoted to X-ray imaging and spectroscopy with high throughput. Both the EPIC focal plane camera instrument, and the RGS dispersive spectrometer require detectors with high sensitivity in the soft X-ray waveband. A description of a program to develop fully depleted back-illuminated CCDs at EEV is given. The device processing steps and methods of optimization are presented. Measurements of X-ray detection efficiency and energy resolution at a range of energies between 0.27 and 2 keV are presented. A model taking into account the back-surface implantation is presented. This enables the data to be compared with theoretical models for the transport and collection of signal charge.

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