Soft X-Ray Critical-Angle Transmission Grating Spectrometer for the International X-Ray Observatory

Computer Science – Performance

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Scientific paper

We have developed a new type of soft x-ray diffraction grating. This critical-angle transmission (CAT) grating [1-4] combines the advantages of traditional transmission gratings (very low mass, extremely relaxed alignment and flatness tolerances) with those of x-ray reflection gratings (high efficiency due to blazing in the direction of grazing-incidence reflection). In addition, grating spectrometers based on CAT gratings are well-suited for co-existence with high-energy focal plane microcalorimeter detectors as planned for the International X-Ray Observatory, since most high-energy x rays are undeflected and arrive at the telescope focus. We have previously micro-fabricated 574 and 200 nm-period prototypes of the smooth, high-aspect ratio, and sub-micron period structures necessary for efficient CAT gratings through interference lithography, anisotropic etching of silicon crystals, and critical-point drying. X-ray test have demonstrated high-efficiency blazing in accordance with theoretical predictions. We will describe the CAT grating principle and design, fabrication, and x-ray efficiency measurements, and discuss various high-resolution (E/ΔE 5000), high-effective area (up to 10,000 cm2) implementations for a CAT grating spectrometer.
This work was supported in part by NASA grants NNX07AG98G and NNX08AI62G.
[1] R. K. Heilmann, M. Ahn, E. M. Gullikson, and M. L. Schattenburg
Blazed High-Efficiency X-Ray Diffraction via Transmission through Arrays of Nanometer-Scale Mirrors
Opt. Express 16, 8658 (2008).
[2] R. K. Heilmann, M. Ahn, and M. L. Schattenburg
Fabrication and Performance of Blazed Transmission Gratings for X-Ray Astronomy
Proc. SPIE 7011, 701106 (2008).
[3] K. Flanagan, et al.
Spectrometer Concept and Design for X-Ray Astronomy Using a Blazed Transmission Grating
Proc. SPIE 6688, 66880Y (2007).
[4] M. Ahn, R. K. Heilmann, and M. L. Schattenburg
Fabrication of Ultrahigh Aspect Ratio Freestanding Gratings on Silicon-on-Insulator Wafers
J. Vac. Sci. Technol. B 25, 2593 (2007).

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