Single-photon avalanche detectors for low-light-level imaging

Details Single-photon avalanche detectors for low-light-level imaging Single-photon avalanche detectors for low-light-level imaging

Oct 1997

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1997spie.3114..333m&link_type=abstract

Proc. SPIE Vol. 3114, p. 333-340, EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy VIII, Oswald H. Siegmund; Mark A. Gumm

Astronomy and Astrophysics

Astronomy

Scientific paper

Linear arrays of single photon avalanche detectors (SPADs) designed for use in low light level imaging applications were fabricated using a novel planar process that is compatible with standard CMOS technology. The device characteristics for these arrays are presented here to investigate their suitability for high efficiency low light level imaging. A new scheme is proposed to eliminate the problem of optical crosstalk between pixels in the array by introducing a trench isolation process coupled with silicon-on-insulator (SOI) technology.

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