Set-up and characterization of a humidity sensor realized in LTCC-technology

Details Set-up and characterization of a humidity sensor realized in LTCC-technology Set-up and characterization of a humidity sensor realized in LTCC-technology

2008-02-21

arxiv.org/abs/0802.3066v1

Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)

Computer Science

Other Computer Science

Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)

Scientific paper

A new type of integrated temperature and humidity sensor applying LTCC-technology has been developed and characterized. In this approach, sensing elements are implemented using heated metal resistors (Pt-elements), where one is exposed to the humid environment that causes the sensor element to cool down with increased humidity, while the other one is sealed from the environment. Sensor design is based on FEA (Finite Element Analyses) where the critical design parameters have been analyzed with regard to the performance characteristic of the device. The set-up of sensor element will be shown and the functional capability will be demonstrated by experimental results.

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