Statistics – Applications
Scientific paper
Jan 2008
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2008spie.6937e.135t&link_type=abstract
Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2007. Edited by Romaniuk, Rys
Statistics
Applications
Scientific paper
The paper under consideration is actually an attempt to theoretically prove the possibility of creation of a sequential nanolithography method with ultimate parameters by using liquid nanojets from reactive elements in order to put the nanotechnology methods on a solid commercial basis. Detection of secondary radiation forming on the contact place of jet and target enables to use the device as scanning microscope.
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В патенте предложен революционный переход от аналоговых методов формирования изображения чипов к цифровым на основе создание принципиально нового струйного нанолитографического оборудования для изготовления и контроля интегральных схем по 2D и 3D топологиям с технологическими нормами до 7.25 нм.
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