Other
Scientific paper
May 2006
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2006georl..3310817r&link_type=abstract
Geophysical Research Letters, Volume 33, Issue 10, CiteID L10817
Other
4
Global Change: General Or Miscellaneous, Atmospheric Processes: Radiative Processes, Atmospheric Processes: General Or Miscellaneous
Scientific paper
Nitrogen trifluoride (NF3) is an industrial gas used in the semiconductor industry as a plasma etchant and chamber cleaning gas. NF3 is an alternative to other potent greenhouse gases and its usage has increased markedly over the last decade. In recognition of its increased relevance and to aid planning of future usage we report an updated radiative efficiency and global warming potentials for NF3. Laboratory measurements give an integrated absorption cross section of 7.04 × 10-17 cm2 molecule-1 cm-1 over the spectral region 200-2000 cm-1. The radiative efficiency is calculated to be 0.21 Wm-2 ppbv-1 and the 100 year GWP, relative to carbon dioxide, is 17200. These values are approximately 60% higher than previously published estimates, primarily reflecting the higher infrared absorption cross-sections reported here.
Gohar L. K.
Hurley Dana M.
Robson J. I.
Shine Keith P.
Wallington T. J.
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