Resolution Limits for Resonant Mems Sensors Based on Discrete Relay Feedback Techniques

Details Resolution Limits for Resonant Mems Sensors Based on Discrete Relay Feedback Techniques Resolution Limits for Resonant Mems Sensors Based on Discrete Relay Feedback Techniques

2007-11-21

arxiv.org/abs/0711.3291v1

Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2006, Stresa, Lago Maggiore : Italie (2006)

Computer Science

Other Computer Science

Submitted on behalf of TIMA Editions (http://irevues.inist.fr/tima-editions)

Scientific paper

This paper is devoted to the analysis of resonant MEMS sensors based on discrete relay feedback techniques. One drawback of such techniques is that some synchronization usually occurs between the discrete part and the continuous part of the system: this results in sensor responses that are very similar to the curves known as devil's staircases, i.e. the frequency does not vary smoothly with the sensor's input. The main contribution of this paper is a theoretical calculation of the resolution of such systems. The resolutions of two existing resonant MEMS architectures are then calculated and these results are discussed.

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