Astronomy and Astrophysics – Astronomy
Scientific paper
Jul 1990
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1990spie.1235..236l&link_type=abstract
IN: Instrumentation in astronomy VII; Proceedings of the Meeting, Tucson, AZ, Feb. 13-17, 1990 (A91-29601 11-35). Bellingham, WA
Astronomy and Astrophysics
Astronomy
Antireflection Coatings, Charge Coupled Devices, Electronic Packaging, Optimization, Quantum Efficiency, Energy Gaps (Solid State), Silicon, Wafers
Scientific paper
Recent research efforts aimed at optimizing charge-coupled devices (CCDs) after their manufacture to achieve maximum quantum efficiency, wide spectral bandpass, and excellent cosmetics and surface flatness are discussed. Results are presented of a new acid thinning agitation technique which produces very uniform, high-quality surfaces on large area square and rectangular CCDs and 4-in silicon wafers for back illuminated operation. A method of cleaning thinned CCDs before antireflection coating for increased quantum efficiency is also discussed. The results of initial experiments with a new packaging method to mount thinned CCDs while maintaining a very flat imaging surface are presented. This bump bonding mounting technique increases yield due to reduced handling and robust packaging and is expandable to tightly packed large area focal plane mosaics.
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