Recent Advances in High-Resolution MEMS DM Fabrication and Integration

Details Recent Advances in High-Resolution MEMS DM Fabrication and Integration Recent Advances in High-Resolution MEMS DM Fabrication and Integration

Sep 2010

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2010amos.confe..22b&link_type=abstract

Proceedings of the Advanced Maui Optical and Space Surveillance Technologies Conference, held in Wailea, Maui, Hawaii, September

Computer Science

Performance

Scientific paper

Deformable mirrors fabricated using microelectromechanical systems technology (MEMS-DMs) have been studied at Boston University (BU) and developed/commercialized by Boston Micromachines Corporation (BMC) over the past decade. Recent advances that might have an impact on surveillance telescopes include demonstration of 4092 actuator DMs with continuous mirror face-sheets, and segmented DMs capable of frame rates of greater than 20kHz for devices with up to 1020 independent segments.
The 4092 actuator DM, developed by BMC for the Gemini Planet Imaging GPI instrument, was recently delivered to the GPI instrument development team. Its packaging and platform development are described, and the performance results for the latest prototype devices are presented.

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