Astronomy and Astrophysics – Astronomy
Scientific paper
May 2002
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2002aas...200.6303m&link_type=abstract
American Astronomical Society, 200th AAS Meeting, #63.03; Bulletin of the American Astronomical Society, Vol. 34, p.747
Astronomy and Astrophysics
Astronomy
Scientific paper
We are developing a programmable large format field mask for the NGST Near Infrared Spectrometer (NIRSpec). The array is a megapixel scale Micro-Electro-Mechanical Systems (MEMS) device comprized of 100 um x 100 um shutters. The actuation is performed magnetically by interaction between the magnetic field of a magnet swept below the shutter array and the high permeability magnetic layer deposited on the shutters. Addressing and latching is done electristatically by applying a voltage between the shutters and a metal coating deposited on the vertical walls of a silicon grid that supports the shutters. The addressing is performed in a cross point addressing scheme. Modeling of the shutters mechanical properties and overall behavior of the system, including stresses and metal fatigue continues. The results of that study will be verified by shutters lab tests. Major milestones have been achieved in the last few month through the demonstation of cryogenic actuation and hold of the shutters and the successful cryogenic operation of the shift registers required for array addressing. This project is supported by NASA funding.
Bier A. J.
Blumenstock Kenneth A.
Chen Chien-Tsu
Ewin Audrey
Fettig Rainer K.
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