Process control methods for THz Schottky-based components

Statistics – Applications

Scientific paper

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Scientific paper

Process control methods are applied to the fabrication technology of single planar varactor Schottky diodes for THz applications. Consequently, the scattering of electrical parameters is reduced by >30 %, whereas the average yield increases from 7 % to 40 %, in spite of the manual fabrication process. Additionally, the breakdown voltage increases by >2 V, and the series resistance decreases by 5 Ω, whereas the ideality factor remains below 1.06.

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