Planetary system for high-uniformity deposited layers on large substrates

Details Planetary system for high-uniformity deposited layers on large substrates Planetary system for high-uniformity deposited layers on large substrates

Mar 1993

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1993spie.1782..238p&link_type=abstract

Proc. SPIE Vol. 1782, p. 238-244, Thin Films for Optical Systems, Karl H. Guenther; Ed.

Computer Science

Scientific paper

The thickness uniformity of vacuum deposited layers is a very important parameter for optical coatings. We have developed a computer program for the calculation of the uniformity as a function of the vapor distribution for planetary systems. This program shows the existence of a configuration such as the uniformity is practically independent of the vapor distribution. We give the example of an experimental system for processing four substrates of 300 mm diameter with a uniformity better than +/- 0.3% in a 1 m3 box coater.

Affiliated with

Also associated with

No associations

Rating

Planetary system for high-uniformity deposited layers on large substrates does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.

If you have personal experience with Planetary system for high-uniformity deposited layers on large substrates, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Planetary system for high-uniformity deposited layers on large substrates will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFWR-SCP-O-1707720