Phase-shifting interferometry using an SHG blue laser diode

Details Phase-shifting interferometry using an SHG blue laser diode Phase-shifting interferometry using an SHG blue laser diode

Jan 2005

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2005spie.5633....1c&link_type=abstract

Advanced Materials and Devices for Sensing and Imaging II. Edited by Wang, Anbo; Zhang, Yimo; Ishii, Yukihiro. Proceedings of

Computer Science

Scientific paper

A digital phase-measurement interferometer using a tunable SHG blue laser at 410nm was developed. This system enables us to test high NA lenses used in high-density optical storage devices. Excellent features such as wavelength tunability, narrow spectral linewidth, and wavelength stability, make the SHG laser very suitable as a light source for a phase-shifting interferometer working at blue-violet wavelength region. We investigated the tuning characteristic of the SHG laser as a function of DBR-section current and found that the wavelength-changing ratio was 0.0017nm/mA. An unbalanced Twyman-Green interferometer with the SHG laser was composed to measure the transmitted wavefront of an optical pickup lens with a NA of 0.85. The theory and experimental results are presented.

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