Phase elements by means of a photolithographic system employing a spatial light modulator

Details Phase elements by means of a photolithographic system employing a spatial light modulator Phase elements by means of a photolithographic system employing a spatial light modulator

Jul 2003

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2003spie.5036...63a&link_type=abstract

Photonics, Devices, and Systems II. Edited by Hrabovsky, Miroslav; Senderakova, Dagmar; Tomanek, Pavel. Proceedings of the SPI

Computer Science

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Scientific paper

The system employs a spatial light modulator (SLM), between a pair of crossed polarizers, and an electronic shutter. Transmission of the SLM with the polarizers is controlled by graphical software that defines which pixels are fully transparent and which are fully opaque. While a particular binary graphics is on the SLM the electronic shutter allows light to pass for a certain time. The graphics is imaged, by an objective, onto a photoresist plate. A mercury lamp is used as a light source. The graphics changes after each exposition and the whole sequence of images determines the resultant surface-relief modulation.

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