Performance of multilayer coated diffraction gratings in the EUV

Details Performance of multilayer coated diffraction gratings in the EUV Performance of multilayer coated diffraction gratings in the EUV

Nov 1990

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1990apopt..29.4529k&link_type=abstract

Applied Optics (ISSN 0003-6935), vol. 29, Nov. 1, 1990, p. 4529-4531.

Astronomy and Astrophysics

Astronomy

9

Ceramic Coatings, Diffraction Patterns, Extreme Ultraviolet Radiation, Gratings (Spectra), Spaceborne Astronomy, Electron Beams, Metal Coatings, Spectral Bands, Vapor Deposition

Scientific paper

The effect of multilayer coating application on the performance of a diffraction grating in the EUV spectral region was evaluated by examining the performance of a 3600-line/mm and a 1200-line/mm replica blazed gratings, designed for operation in the 300-A spectral region in first order. A ten-layer IrSi multilayer optimized for 304 A was deposited using electron-beam evaporation. The grating efficiency was measured on the SURF II calibration beamline in a chamber designed for calibrating the solar EUV rocket telescope and spectrograph multilayer coatings. A significant (by a factor of about 7) enhancement in grating efficiency in the 300-A region was demonstrated.

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