Performance of milliKelvin SI bolometers as x-ray and exotic particle detectors

Details Performance of milliKelvin SI bolometers as x-ray and exotic particle detectors Performance of milliKelvin SI bolometers as x-ray and exotic particle detectors

Oct 1991

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1991spie.1549..274z&link_type=abstract

Proc. SPIE Vol. 1549, p. 274-282, EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy II, Oswald H. Siegmund; Richard E. Rot

Astronomy and Astrophysics

Astronomy

Scientific paper

Silicon bolometers are currently under development for milliKelvin operation; these devices are being produced using Si wafer fabrication technology. The design and performance of individual bolometers, using doped layers with a thickness in the range 0.1 to 3 (mu) , are described. The use of epitaxial growth to replace ion implantation for improved performance is described and initial results reported.

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