Performance evaluation of a MEMS-based deformable mirror for adaptive optics

Details Performance evaluation of a MEMS-based deformable mirror for adaptive optics Performance evaluation of a MEMS-based deformable mirror for adaptive optics

Dec 2003

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2003spie.5162...70w&link_type=abstract

Advanced Wavefront Control: Methods, Devices, and Applications. Edited by Gonglewski, John D.; Vorontsov, Mikhail A.; Gruneisen

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Adaptive optics systems have seen widespread adoption in the astronomy community. However, next generation telescopes with large apertures and wide fields of view, not to mention the desire to correct for atmospheric turbulence at optical wavelengths, will require a dramatic increase in the number of actuators required for correction. Micro-Electro-Mechanical Systems (MEMS) provide a potential solution to this demand for densely packed actuator arrays. In this paper the characteristics of a 140 actuator MEMS based deformable mirror (DM) are investigated with particular emphasis on its application in astronomical adaptive optics systems. In particular the DM surface quality, actuator stroke and influence function are investigated as well as the residual error when attempting to correct Zernike modes.

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