Optimization of Cricket-inspired, Biomimetic Artificial Hair Sensors for Flow Sensing

Details Optimization of Cricket-inspired, Biomimetic Artificial Hair Sensors for Flow Sensing Optimization of Cricket-inspired, Biomimetic Artificial Hair Sensors for Flow Sensing

2008-02-26

arxiv.org/abs/0802.3768v1

Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007)

Computer Science

Other Computer Science

Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)

Scientific paper

High density arrays of artificial hair sensors, biomimicking the extremely sensitive mechanoreceptive filiform hairs found on cerci of crickets have been fabricated successfully. We assess the sensitivity of these artificial sensors and present a scheme for further optimization addressing the deteriorating effects of stress in the structures. We show that, by removing a portion of chromium electrodes close to the torsional beams, the upward lift at the edges of the membrane due to the stress, will decrease hence increase the sensitivity.

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