Optical metrology used to sense and control a segmented optical system

Details Optical metrology used to sense and control a segmented optical system Optical metrology used to sense and control a segmented optical system

Dec 1993

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1993spie.2003...65f&link_type=abstract

Proc. SPIE Vol. 2003, p. 65-76, Interferometry: Techniques and Analysis II, Osuk Y. Kwon; Gordon M. Brown; Malgorzata Kujawinska

Computer Science

Scientific paper

Optical metrology was developed to sense the wavefront of a mosaic optical system to correctly position and bend an active optical element. The optical system being examined is a telescope, with a segmented primary mirror, tested in auto-collimation. Located in the focal plane are two interferometers, a simultaneous phase shifting interferometer which measures the system wavefront and a lateral shearing interferometer which measures piston. The resultant wavefront and piston data are passed to a master computer which computes the forces and vectors necessary to position and bend the active element. This paper describes these interferometers, their evolution, requirements, calibration, and data evaluation techniques employed. Results from actual system testing are presented.

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