Computer Science
Scientific paper
Jan 2005
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2005spie.5633...31s&link_type=abstract
Advanced Materials and Devices for Sensing and Imaging II. Edited by Wang, Anbo; Zhang, Yimo; Ishii, Yukihiro. Proceedings of
Computer Science
Scientific paper
The rough surface of a aluminum cylindrical drum cut by turning tool is measured with a fast scanning method by detecting angular deflection of a laser beam. Reflection pattern from the surface extended into a large region, and contained two kinds of components of narrow and wide patterns. To detect rough surface's slope, the barycentric position of the wide pattern was measured with a PSD, and a beam diameter of 5mm on the surface was adopted. After a proportionality coefficient to convert from PSD output to the surface's slope was determined, an one-dimensional surface profile measurement of the rough surface was performed without a vibration isolator. Measurement error was estimated to be 0.27μm.
Sasaki Osami
Shinozaki Ryo
Suzuki Takamasa
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