Mathematics – Probability
Scientific paper
Sep 2002
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2002spie.4919...54z&link_type=abstract
Advanced Materials and Devices for Sensing and Imaging. Edited by Yao, Jianquan; Ishii, Yukihiro. Proceedings of the SPIE, Volu
Mathematics
Probability
1
Scientific paper
Monte Carlo simulations are adopted to develop a numerical program to study the electron motion in the H2/CH4 gas mixture and the non-uniform electric field during diamond synthesis via Electric Assisted Chemical Vapor Deposition (EACVD) in order to understand this dynamical process. It is proved in this paper that there exists a reverse electric field near the substrate. With this reverse electric field, the effective radicals such as CH3+ and CH+ can be speeded up and impact on the substrate with a higher speed, thus increase the probability of bonding. At last the electron average energy distribution and the steady space distributions of the effective radicals such as CH3, CH3+, CH+ and H under this field distribution are given in this paper.
Wen Qinruo
Xin Hongli
Yan Zheng
Yang Jingfa
Zhang Jing
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