New quantitative optical depth profiling methods by attenuated total reflectance Fourier transform infrared spectroscopy: Multiple angle/single frequency and single angle/multiple frequency approaches

Details New quantitative optical depth profiling methods by attenuated total reflectance Fourier transform infrared spectroscopy: Multiple angle/single frequency and single angle/multiple frequency approaches New quantitative optical depth profiling methods by attenuated total reflectance Fourier transform infrared spectroscopy: Multiple angle/single frequency and single angle/multiple frequency approaches

Jun 1998

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1998aipc..430...40i&link_type=abstract

The eleventh international conference on fourier transform spectroscopy. AIP Conference Proceedings, Volume 430, pp. 40-59 (199

Computer Science

1

Organic Compounds, Polymers, Fourier Analysis

Scientific paper

New analytical techniques for depth profiling using multiple-angle or single-angle attenuated total reflection Fourier transform infrared spectroscopy have been developed. Unlike the techniques traditionally used, these new approaches do not require prior knowledge of the complex refractive index profile for the depth profiling calculation, can be applied to strong absorption bands, and are able to utilize incident beams of arbitrary degree of polarization. The multiple-angle approach performs the depth profiling calculations on a set of angle-dependent absorptances at a single frequency, whereas the multiple-frequency approach uses a set of frequency-dependent absorptances from a single spectrum. Both techniques are based on a similar algorithm for the depth profiling calculations. The depth profiling analysis consists of three steps. First, the estimated complex refractive index profile is obtained by solving a set of linear equations of absorptance. This estimated profile is used as a trial profile in a linear fitting of absorptances calculated by exact optical theory to the experimental values. The reconstructed profile is obtained from the converged profile. Finally, the reconstructed profile is used in a non-linear fitting of reflectance. The converged profile from the non-linear fitting is the depth profile of the system. Many types of composition gradients can be successfully profiled without any a priori knowledge of the nature of the profile. The effect of noise on the quality of the profile is evaluated. The multiple-angle technique is appropriate for systems with slow changes in composition profile and those with significant intermolecular interactions, while the multiple-frequency approach is suitable for the study of systems with rapidly changing phenomenon where little intermolecular interactions or structural changes are present. The rapid spectral acquisition time of the multiple-frequency approach introduces the possibility of real-time depth profiling.

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