New Internal Stress Driven on-Chip Micromachines for Extracting Mechanical Properties of Thin Films

Computer Science – Other Computer Science

Scientific paper

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

Submitted on behalf of TIMA Editions (http://irevues.inist.fr/tima-editions)

Scientific paper

A new concept of micromachines has been developed for measuring the mechanical properties of thin metallic films. The actuator is a beam undergoing large internal stresses built up during the deposition process. Al thin films are deposited partly on the actuator beam and on the substrate. By etching the structure, the actuator contracts and pulls the Al film. Full stress strain curves can be generated by designing a set of micromachines with various actuator lengths. In the present study, the displacements have been measured by scanning electronic microscopy. The stress is derived from simple continuum mechanics relationships. The tensile properties of Al films of various thicknesses have been tested. A marked increase of the strength with decreasing film thickness is observed.

No associations

LandOfFree

Say what you really think

Search LandOfFree.com for scientists and scientific papers. Rate them and share your experience with other people.

Rating

New Internal Stress Driven on-Chip Micromachines for Extracting Mechanical Properties of Thin Films does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.

If you have personal experience with New Internal Stress Driven on-Chip Micromachines for Extracting Mechanical Properties of Thin Films, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and New Internal Stress Driven on-Chip Micromachines for Extracting Mechanical Properties of Thin Films will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFWR-SCP-O-414332

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.