Mathematics – Logic
Scientific paper
Aug 1984
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1984cuil.rept.....l&link_type=abstract
Final Technical Report, 1 Jun. 1980 - 31 May 1984 Chicago Univ., IL.
Mathematics
Logic
Crystallography, Fabrication, Gallium Arsenides, High Resolution, Ion Beams, Ion Microscopes, Mass Spectroscopy, Microelectronics, Scanning, Calcification, Image Contrast, Meteorites, Minerals, Photolithography
Scientific paper
The University of Chicago and Hughes Research Laboratories have successfully completed a four-year collaborative program for the development and construction of two 60 kV high-resolution, high current density ion-microscopes/microprobes. Performance evaluation tests with a liquid gallium ion source have thus far demonstrated focused spot diameters of 90 and 45 nanometers, excellent imaging capacity using ion-induced secondary electrons and ion signals, and unusual performance of a high-transmission secondary ion mass spectrometry system. Concurrently with the new microprobe development, previously existing prototype scanning ion microscope have been employed in fundamental studies of ion-solid interactions and contrast mechanisms in ion microscopy, where ion-channeling effects in crystalline materials yield images exhibiting extraordinary crystallographic contrast. Exploratory research applications of the new microprobes comprise elemental mapping at high spatial resolution (50 nm) of microelectronic structures and devices in gallium arsenide, studies of the elemental composition and mineral distribution in stony meteorites (chondrites), with emphasis on the analysis of the rims of primordial aggregate bodies (chondrules), the detection of staging domains in antimony pentachloride-intercalated graphites, elemental mapping in minerals of biological origin, in particular the detection the onset of calcification in bone tissues, and various approaches to focused ion beam microfabrication and microlithography, where structures with 100 nm linewidth have been demonstrated.
No associations
LandOfFree
New high resolution scanning ion microprobe and focused ion beam applications does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.
If you have personal experience with New high resolution scanning ion microprobe and focused ion beam applications, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and New high resolution scanning ion microprobe and focused ion beam applications will most certainly appreciate the feedback.
Profile ID: LFWR-SCP-O-1675338