Nanometric precision bidimensional optical flat testing

Computer Science

Scientific paper

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Scientific paper

Absolute optical flat testing using the classical three flat method poses repositioning problems and basically only yields one absolute diameter. Although not giving access tot he mean curvature, the method we propose only requires relative displacements and yields a 2D map of the departure of the flat to the best sphere. Simulations and experimental data have been achieved up to a 301 by 301 sampling, showing a repeatability in the neighborhood of 1 nm P-V.

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