Nanometer-class structural actuators and instruments for subnanometer metrology

Computer Science – Performance

Scientific paper

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Scientific paper

The author has recently completed the development of a series of structural actuators for supporting the segments of the primary mirror in various configurations of NASA's Next Generation Space Telescope. Separately, the author has been developing a `calibrated displacement actuator' for use in calibrating metrology instruments used to make nanometer- scale measurements. This paper reports on the performance of both the calibrated displacement actuator called `HECTOR- 100tm' and the Rubicontm structural actuator. It also discusses the benefits of incorporating a HECTOR-100- type actuator as a hyperfine third stage in a structural actuator for controlling mirror surfaces for very high resolution imaging as possibly in the visible or UV portions of the spectrum.

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